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| Wafer SMIF Pod - 200mm(8 inch)

 
Wafer SMIF Pod
Products Specification
● Product name:Wafer SMIF Pod
● Part number:WSP200
● Dimension:292.2(L) x 282.8(W) x 253.6(H)mm
● Weight:2600g
● Capacity:1 Set 8”Wafer Cassette
● Apply for round wafer:200mm(8 inch)
● Material:PC/PC ESD
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Products Description

Wafer SMIF Pod is able to load Cassette with wafers inside, provide protection to wafers during delivery and storage between process and process. Size comply with SEMI standard, provide high cleanliness to wafer loading and automation solution, which can be used in SEMI Auto ALU Automatic Machine.

● High cleanness transfer, Purge & Non Purge, High temperature wear resistance
● CHD with three-point positioning contact design can reduce print mark.

Wafer SMIF Pod Wafer SMIF Pod Door assembling with out screw design.
Wafer SMIF Pod Wafer SMIF Pod ● Door assembling with out screw design.
Patent No.:
Taiwanese Patent No.:M582948
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6" Wafer SMIF Pod   6" PEEK Cassette   12" 25 slot FOUP   12" 13 slot FOUP
 
 
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